Correlation of Microstructure and Tribological Properties of Dry Sliding Nanocrystalline Diamond Coatings

摘要

Nanocrystalline diamond (NCD) offers great potential for many micro-mechanical systems, particularly where low friction, thermal mismatch and mechanical integrity are of great importance. The reduction of grain size in NCD films to a few nanometers is, however, accompanied by a significant change in morphological, chemical, mechanical and wear properties. The evaluation of these properties is therefore necessary before designing NCD-coated micro-mechanical components for which reliability, wear and long lifetime are critical issues.