A study on vacuum system of sealing-exhaust equipment for ceramic metal halide lamp

摘要

Based on the analysis of sealing-exhaust process for arc tube of ceramic metal halide lamp(CMH) and the calculation to a few key vacuum parameter, this report proposes a design plan of the sealing-exhaust equipment's vacuum system for arc tube of ceramic metal halide lamp, and finally tube of ceramic metal halide lamp, and finally verifies the conductance of vacuum system to reach the design desire.