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Technical Parameter Research of High Purity Green SiC from Cutting Waste Mortar of Solar Silicon Wafer

机译:太阳能硅片废砂浆高纯绿色SiC技术参数研究

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The green SiC (silicon carbide) powder, cutting fluid and pure Si (silicon) has the great recovery value in cutting waste mortar of solar silicon wafer. Nowadays, the critical technology of recycling SiC powder is classification technology in which the quality of recovery SiC powder is depended on classification precision. The self developed turbine air classifier (LNC-120A-2 type with two air classifier connected) was used in this experiment. The test dust is dry admixture of waste mortar containing SiC (JIS1200 #) through pretreatment. Through the orthogonal experiment, the optimum classification condition: the speed of first stage classifier is 1914rpm, the speed of second stage classifier is 3480rpm, the secondary air flow of second stage classifier is 13m3/h, the disperse pressure is 0.2MPa and the total system air volume is 1400m /h. Under this condition, the classification precision of SiC powder is 85.73%, the particle size d50 is 9.571μm meeting the demand of JIS1200#, the recovery efficiency is 89.2% and yield is 65Kg/h. Sometimes, the results show: the granule morphology of recovery SiC powder is basically some with standard SiC powder of JIS1200#, meeting the effective cutting for silicon wafer.
机译:绿色的SiC(碳化硅)粉,切削液和纯Si(硅)在切削太阳能硅片的废砂浆中具有很大的回收价值。如今,回收SiC粉的关键技术是分级技术,其中回收SiC粉的质量取决于分级精度。本实验使用自行开发的涡轮空气分级机(连接两个空气分级机的LNC-120A-2型)。测试粉尘是经过预处理的含SiC(JIS1200#)的废砂浆的干掺合料。通过正交试验,确定最佳的分级条件:一级分级器的速度为1914rpm,二级分级器的速度为3480rpm,二级分级器的二次风为13m3 / h,分散压力为0.2MPa,总和为系统风量为1400m / h。在此条件下,SiC粉的分级精度为85.73%,粒径d50为9.571μm,满足JIS1200#的要求,回收效率为89.2%,产率为65Kg / h。有时,结果表明:回收的SiC粉末的颗粒形貌基本与JIS1200#的标准SiC粉末相同,可以有效地切割硅片。

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