Data Analysis for Yield Improvement using TIBCO's Spotfire Data Analysis Software

摘要

TIBCO Spotfire [1] is powerful, flexible data analysis software that has wide applications in various industries, including semiconductors. At TriQuint, the software has been deployed and in use for 5 years and has seen increasing use among various engineering groups for a wide range of investigations related to design, manufacturing test, wafer fabrication and production metrics. In the paper, we describe the general features of TIBCO Spotfire and examples of analysis using this software.