Shape Effect on the Reflectance of Sub-Wavelength Structures on Silicon Nitride for Solar Cell Application

摘要

We stdy the spectral reflectivity of conical-, cylindrical-and parabolic-shaped silicon nitride (Si_3N_4) sub-wavelength structures (SWS). A multilayer rigorous coupled-wave approach is adopted to estimate the reflection properties of Si_3N_4 SWS. Optimal shapes of SWS in terms of effective reflectance are analyzed over a range of wavelength. The results of our study show that a 3.15% effective reflectivity could be achieved for the optimized conical-shaped SWS with the height of 160 ran and the non-etched Si_3N_4 layer thickness of 70 nm among different shape structure.