Although high aspect ratio micro and nanoscale polymer features have been replicated in a range of polymers using injection molding, researchers have also used tooling inserts with a range of sizes, aspect ratios, and tooling materials. In this work, microscale features with molded in polymethylmethacrylates using three types of tooling with similar features. The tooling materials included silicon wafers with an antistiction coating, gold-coated nickel inserts, and a metal-polymer hybrid tooling. Tooling was evaluated based on the ease of melt filling and part ejection; the replication quality as characterized using optical profilometry, confocal microscopy, and scanning electron microscopy; and the damage to the tooling after repeated use. With lower aspect ratio features, the tooling type did not significantly affect replication, but for higher aspect ratio features the hybrid tooling provided far better replication than the silicon tooling. This difference was attributed to retardation of heat transfer in the features of the hybrid tooling. All three tooling materials exhibited polymer-free surfaces after injection molding.
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