Efficient implementation of the Fourier modal method (RCWA) for the optical simulation of optoelectronics devices

摘要

This paper presents a new implementation of the Fourier modal method to solve the Maxwell equations in nano-structured solid state devices like solar cells and image sensors. The proposed method is based on an improved T-matrix approach in which the well-known stability problems are solved by adopting multi-precision arithmetic. Examples of application to the analysis of surface texturing in silicon solar cells are reported.