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Theoretical investigation of piezo-optic effect in photonic crystal nanocavity for nanostrain detection

机译:用于纳米应变检测的光子晶体纳米腔中的压电效应的理论研究

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This paper reports a theoretical investigation of the strain sensitive effect of a 2D photonic crystal (PhC) nanocavity resonator for mechanical sensing applications. The nanocavity is created by missing a circle of air holes in the array of triangular lattice of air holes. The strain sensitivity of a high quality factor PhC nanocavity has been investigated based on the finite element method (FEM) using ANSYS™ software and the finite different time domain (FDTD) simulation using CrystalWave™. Linear relationship between strain and shift of the resonant wavelength of the cavity has been obtained. The strain-induced resonant wavelength shifts or strain sensitivities to longitudinal and transverse strains have been theoretically determined to be 1.9 nm/mε and 0.25 nm/mε, respectively. The fabrication process of the test sample is carried out.
机译:本文报道了对用于机械传感应用的2D光子晶体(PhC)纳米腔谐振器的应变敏感效应的理论研究。通过在气孔的三角形格子的阵列中缺少一个气孔的圆圈来创建纳米腔。基于使用ANSYS™软件的有限元方法(FEM)和使用CrystalWave™的有限时域有限差分(FDTD)仿真,已经研究了高质量因子PhC纳米腔的应变敏感性。已经获得了应变与腔的谐振波长的偏移之间的线性关系。理论上已经确定了应变引起的共振波长偏移或应变对纵向和横向应变的敏感性分别为1.9 nm /mε和0.25 nm /mε。进行测试样品的制造过程。

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