Plasma resistance of perfluoroelastomer and fluoroelastomer seals used in plasma environments

摘要

Plasma is a very versatile tool for many applications. Due to its high reactivity and harsh environments, sealing materials are crucial for safety, process stability and productivity. Seals made from perfluoroelastomers and fluoroelastomers are normally used in critical locations in plasma environment due to their extraordinary chemical inertness, high thermal stability and cleanness. Elastomeric sealing materials made from perfluoroelastomers and fluoroelastomers as well as other elastomers are studied in various plasma environments and plasma attack mechanism will be discussed.