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Quality improvement and cost reduction using statistical outlier methods

机译:使用统计异常值方法提高质量并降低成本

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Quality improvement and cost reduction in the overall IC manufacturing and test processes are being continuously sought. Outlier screening methods can address both of these needs. As technology scales, it has become increasingly difficult to screen outliers without excessive Type I or II errors. Hundreds of parameters are collected at wafer probe, but there lacks a systematic way of selecting outlier screens. In this paper we describe a statistical approach to both identify outliers and select beneficial screening parameters more effectively. Results on a 90 nm design to reduce the burn-in fails are described.
机译:人们一直在寻求在整个IC制造和测试过程中提高质量和降低成本的方法。离群值筛选方法可以满足这两个需求。随着技术的发展,在没有过多的I或II类错误的情况下,筛选异常值变得越来越困难。晶圆探针收集了数百个参数,但是缺少选择异常值筛选器的系统方法。在本文中,我们描述了一种统计方法,既可以识别异常值,也可以更有效地选择有益的筛选参数。描述了在90 nm设计上减少老化失败的结果。

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