An accurate procedure is proposed to characterize distributed parameters of silicon-based patterned shield and patterned ground shield coplanar waveguides (PS-and PGS-CPWs),where skin and proximity effects are treated appropriately. These interconnects can include symmetrical,asymmetrical,non-uniform,and even differential transmission lines. Numerical investigations are carried out to show the influence of various geometrical and physical parameters on the frequency-dependent distributed parameters,which is important in the design of silicon-based microwave and millimeter wave integrated circuits.
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