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Optical metrology for very large convex aspheres

机译:大型凸非球面的光学计量

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摘要

Telescopes with very large diameter or with wide fields require convex secondary mirrors that may be many meters in diameter. The optical surfaces for these mirrors can be manufactured to the accuracy limited by the surface metrology. We have developed metrology systems that are specifically optimized for measuring very large convex aspheric surfaces. Large aperture vibration insensitive sub-aperture Fizeau interferometer combined with stitching software give high resolution surface measurements. The global shape is corroborated with a coordinate measuring machine based on the swing arm profilometer.
机译:直径很大或视野很广的望远镜需要凸的辅助镜,其直径可能是几米。这些反射镜的光学表面可以制造到表面计量所限制的精度。我们已经开发了专门用于测量非常大的凸非球面的计量系统。大孔径振动不敏感的亚孔径Fizeau干涉仪与拼接软件相结合,可提供高分辨率的表面测量。使用基于摆臂轮廓仪的坐标测量机来确认整体形状。

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