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Arsenic and Antimony Doping: An Attempt to Deposit n-type CVD Diamond

机译:砷和锑掺杂:尝试沉积n型CVD金刚石

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We report the results of experiments that attempt to deposit n-type CVD diamond in a standard hot filament reactor using 1%CH_4/H_2 gas mixtures, using (i) AsH_3 as a gas phase source of arsenic, and (ii) evaporated Sb or Sb(Ph)_3 as a source of antimony. SIMS measurements revealed that under these conditions, neither Sb nor As is incorporated into the diamond film, and the Raman spectra, electrical conductivity and crystallite morphology remain unchanged from that of undoped diamond. These experiments confirm the predicted low incorporation efficiency for As and Sb, and we conclude that doping CVD diamond with these elements cannot readily be achieved in this manner.
机译:我们报告了尝试在标准热丝反应堆中使用1%CH_4 / H_2气体混合物沉积n型CVD金刚石的实验结果,这些实验使用(i)AsH_3作为砷的气相源,以及(ii)蒸发的Sb或Sb(Ph)_3作为锑的来源。 SIMS测量表明,在这些条件下,Sb和As均未掺入金刚石膜中,拉曼光谱,电导率和微晶形态与未掺杂的金刚石相同。这些实验证实了As和Sb的预计低掺入效率,并且我们得出结论,用这些元素掺杂CVD金刚石不容易以这种方式实现。

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