Synthesis of Controllably Grown Carbon Nanotubes Interconnects

摘要

Carbon nanotube (CNT) intra-connects (bridges spanning across in-plane electrodes) were fabricated. We have assessed several growth methods for these intra-connects: Plasma Enhanced Chemical Vapor Deposition with CO precursor (PECVD/CO), CVD/ethanol and pyrolitic CVD/CO. PECVD/CO has been used with a mixture of CO/H_2 at relatively low temperatures. Its yield was relatively low and quality of the intra-connects was not to par. CVD/ethanol resulted in many more multi-wall carbon nanotubes (MWCNT) than single-wall carbon nanotube (SWCNT) intra-connects. CVD/CO was the most effective and simplest way to grow CNT intra-connects among the three methods, yielding well-aligned and straight SWCNT bridges.