For removal treatments of used sulfur hexafluoride (SF6) gas, a combination process in non-thermal plasma decomposition with photochemical collection toward a suitable material is experimentally investigated. In the present process, oxyfluorides such as SOF2, SO2F2, and SOF4 produced by non-thermal plasma are decomposed by photochemical reactions; consequently the decomposed molecules are adsorbed to a solid calcium compound material. Since the reaction requires relative higher-energy photons to activate the molecules, a vacuum-ultraviolet light irradiation emitted from a Xe discharge lamp is effective to the reaction. The vacuum-ultraviolet photochemical reaction to non-thermal plasma oxidized SF6 gases is evaluated in an experimentally constructed reactor and the SF6 removal treatment based on the photochemical reaction is discussed.
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