Low-loss wide-band filters and resonator filters using high temperature stable high electromechanical coupling acoustic surface wave substrates using micro-fabrication technology

摘要

SiO_2/rotated Y-cut, X-propagating LiNbO_3 leaky SAW substrates with a large k~2(over 0.2) and zero TCF at a small thickness of SiO_2 of H/λ = 0.2 (H: SiO_2 film thickness, λ: (SAW wave-length) compared to those of other substrates and zero propagation attenuation in the case of metalized surface. Theoretical and experimental results for low-loss filters, resonators and resonator filters are described. The low-loss filters using (FEUDT) showed an insertion loss of below 1dB at a center frequency of 400MHz and bandwidth of 20MHz using micro-fabrication technology. Also, the resonator showed wide-band characteristics and resonator filters showed a bandwidth of 89MHz at a center frequency of 500MHz.