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Design and manufacturing of active-matrix organic light-emitting microdisplays on silicon

机译:硅上有源矩阵有机发光微显示器的设计与制造

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Abstract: An organic light-emitting diode (OLED) microdisplay is described. The OLED display has a top-emitting structure integrated on single-crystal active-matrix driver chips and is sealed in a fully hermetic package. All processing and fabrication is done on 8-in. wafers until final dicing and assembly. The basic structure of the displays, the key manufacturing and processing steps, and initial performance of a monochrome green active-matrix OLED device structure are presented. Key advantages of the chosen approach as well as remaining challenges and requirements for improvements are discussed. !7
机译:摘要:描述了一种有机发光二极管(OLED)微型显示器。 OLED显示器具有集成在单晶有源矩阵驱动器芯片上的顶部发射结构,并密封在完全密封的封装中。所有处理和制造均在8英寸上完成。晶圆,直到最终切割和组装。介绍了显示器的基本结构,关键的制造和加工步骤以及单色绿色有源矩阵OLED器件结构的初始性能。讨论了所选方法的主要优点以及尚待改进的挑战和要求。 !7

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