Relationship between internal stress and deformation of diaphragm at elevated temperatures using SEM

摘要

Abstract: This paper reports a study of the relationship between internal stress and deformation of diaphragm at elevated temperatures using scanning electron microscope. It is necessary to make a flat diaphragm in order to obtain good performance for various diaphragm-type sensors using heat transfer, such as flow sensors and accelerometers. When these sensors are used in high temperature environments, a flat diaphragm is required. Therefore, it is very important to observe and control the deformation behavior of a diaphragm at various temperatures. As far as we know, few results have been reported on the observation of deformed diaphragms at elevated temperatures.!4