Abstract: Recently LCOS microdisplays are becoming available for personal IT applications, despite some problems which are less critical in poly silicon or amorphous silicon based displays. The most common problems which must be encountered are the polarization of the pixels and the light shielding of the silicon substrate. In this paper a methods proposed which solves the light shielding and pixel flatness problem. A non-critical back-end processing which can be applied outside the silicon foundry has been developed. The effectiveness of the light shielding on a working demonstrator display is shown. To avoid light losses caused by a polarization filter, a polymer dispersed LC has been chosen. By decreasing the cell gap we made the PDLC voltage compatible with a standard 3 $mu@m CMOS process and its response fast enough to be used for video applications. It is shown that this choice is very suited in direct view and portable applications. The realized prototype has 3 bit grey levels and is video compatible and can be used in a number of applications, such as personal viewers, PDAs and data displays. !12
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