Modeling an electronic component manufacturing system using Object Oriented Colored Petri Nets

摘要

Object Oriented Colored Petri Net (OOCPN) was proposed for DEDS (discrete event dynamic systems) modeling and simulation, especially it has been studied deeply in FMS (flexible manufacturing systems) (1995). However, for semiconductor manufacturing systems, it can not be applied directly since this kind of systems have some hybrid conception which OOCPN cannot describe. In this paper we extend OOCPN to hybrid conception by enhancing it with time delay and firing speed, and use this hybrid-like OOCPN for semiconductor manufacturing systems. A specific system (1998) is used to illustrate and demonstrate the proposed model.