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A novel method to determine the mechanical properties of ultra-thin films

机译:确定超薄膜机械性能的新方法

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Recent experimental results based on x-ray reflectivity [1,2], and ellipsometry [3] have demonstrated that physical properties of polymer films thinner than one micron may deviate significantly from bulk values [4]. The mechanical properties of the ultra-thin films (sub-micron) are experimentally difficult to determine with precision. The quartz crystal microbalance is an established technique for measuring properties of polymer thin films of a few microns thick. [5-7] Recently this quartz crystal microbalance technique has been modified for measuring the mechanical properties of sub-micron polymer films with high precision. The details and preliminary results from this recently modified quartz crystal microbalance technique will be presented.
机译:基于x射线反射率[1,2]和椭圆偏振[3]的最新实验结果表明,比1微米薄的聚合物薄膜的物理性能可能会明显偏离体积值[4]。实验上难以精确确定超薄膜(亚微米)的机械性能。石英晶体微天平是一种用于测量几微米厚的聚合物薄膜性能的成熟技术。 [5-7]最近,已经对该石英微平衡技术进行了改进,以高精度测量亚微米聚合物薄膜的机械性能。将介绍此最新修改的石英晶体微量天平技术的详细信息和初步结果。

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