Passive micro-flow regulator for drug delivery system

摘要

In this paper ain innovative micromachined passive flow regulator for implantable drug delivery systems in presented. The aim is to passively achieve a constant flow rate over a certain pressure range through linear variation of a flow resistance. This flow regulator is based on bending membrance contact w ith a micromachied substrate. A first serie of samples has been realized using standard Silicon micromachining. For better biochemical performances, a second verson of the device has been manufactured in Titanium using a combination of micromachining and conventiaon machining. Test results how a DI water flow regulation of 6 nanoliters per second over a pressure range between 100 mbar and 700 mbar.