Hierarchical mask data design system (PROPHET) for aerial image simulation automatic phase-shifter placement and subpeak overlap checking

摘要

Abstract: A hierarchical and interactive mask data design system (PROPHET) has been developed for aerial image simulation, fast subpeak overlap checking of adjacent patterns in attenuated phase-shifting masks, and automatic phase-shifter placement. This system, linked with a layout editor through an added-on menu, allows the designer to perform layout while concurrently considering mask data, taking into account design restrictions imposed by ultra-high resolution technology. !3