Application of fiber optic sensors to wastewater management using microelectronics fabrication processes

摘要

Abstract: The concept of waste water treatment frommicroelectronics fab processes is referring to wastewater discharged from ultrapure water plant which can'tbe treated on recovery waste water section. Thesewastes concentrated contain organic and inorganicacids, alkalis, metals, cyanide, chromium and fluorideeffluent from fab processes. They will be canalized onqualities for treatment sections which permit thedischarge of treated waste water as neutral with solidsremoval as compacted sludge. For management of thewaste water treatment plant we are using the fiberoptic sensors as follows: level and flow control,signalization automatic pumps control and protection,solid control, leak detection a.s.o. The neutralquality of treated water has 'null' impact against theenvironmental system recommended for all semiconductorsand microelectronics fab processes. !0