Prospects for active matrix displays on plastic

摘要

We review the status of active matrix display fabrication on a plastic substrates,specifically active matrix liquid crystal displays (AM lCDs). Research efforts in the U.S.and Europe are surfeyed.Currently available transparent plastics,and acxtive programs to improve these materials are described.Our work on thin film transistor (TFT) fabrication at 125 deg C is then reported,with a comparison of reacxtive sputtering and plasma enhanced CVD methods.