Abstract: A silicon-based tactile sensor is fabricated and tested on human subjects. The sensor is packaged in a flexible polyimide-based skin which allows the sensor to be mounted on the finger. The sensor is fabricated using anisotropic and isotropic etching, silicon-to-silicon bonding, and other standard microfabrication technologies. The sensor was characterized on the bench. The sensor is capable of withstanding loads in excess of 100 N. Typical output sensitivity is 1.4 mV/V/N. In addition, a dynamic calibration and a tracking experiment were performed on human subjects. For the human subject experiments the sensor was mounted on the distal phalangeal pad of the thumb on the dominant hand. A dual beam strain gage dynamometer was used to measure the actual forces. The force range for the dynamic calibration was based on the maximum acceptable pinch force of the subjects. Sensor design and operation are described. Statistical analysis of the human subject experiment is presented and future work is discussed. !4
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机译：摘要：制作了一种基于硅的触觉传感器，并在人体上进行了测试。传感器包装在柔性的聚酰亚胺基皮肤中，该皮肤可以将传感器安装在手指上。该传感器是使用各向异性和各向同性蚀刻，硅与硅的键合以及其他标准的微制造技术制造的。传感器在工作台上进行了表征。该传感器能够承受超过100 N的负载。典型的输出灵敏度为1.4 mV / V / N。此外，还对人体进行了动态校准和跟踪实验。对于人体实验，传感器安装在优势手的拇指远侧指骨垫上。双梁应变计测力计用于测量实际力。动态校准的力范围基于受试者的最大可接受捏力。描述了传感器的设计和操作。提出了对人体实验的统计分析，并讨论了未来的工作。 ！4
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