Abstract: Small size ring resonators with ring diameter of 2 mm are fabricated using silicon nitride waveguides on silicon. The small diameter of the ring allows a large free spectral range of 26 GHz. Doped polysilicon is used as thermo-optic heating element to temperature tune and ring resonator. A poly-Si resistor is used for the first time as a thermistor to measure the waveguide temperature. The temperature coefficient of the poly-Si thermistor is measured to be 9.5 $MUL 10$+$MIN@4$//$DGR@C. The finesse of the ring resonator is 68 and the contrast 46%. The propagation loss of the silicon nitride rib waveguide is 0.1 dB/cm at 1312 nm. The temperature coefficient of the optical path length of the waveguide is 1.5 $MUL 10$+$MIN@5$//$DGR@C.!13
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机译：摘要：使用硅上的氮化硅波导制造了直径为2 mm的小尺寸环形谐振器。环的小直径允许26 GHz的大自由光谱范围。掺杂的多晶硅用作热光加热元件，以进行温度调谐和环形谐振器。多晶硅电阻首次用作热敏电阻，以测量波导温度。多晶硅热敏电阻的温度系数经测量为9.5 $ MUL 10 $ + $ MIN @ 4 $ // $ DGR @ C。环形谐振器的精细度为68，对比度为46％。氮化硅肋形波导在1312 nm处的传播损耗为0.1 dB / cm。波导的光路长度的温度系数为1.5 $ MUL 10 $ + $ MIN @ 5 $ // $ DGR@C.!13
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