Toward the development of a non-invasive pressure-flow sensor system for the detection of prostate cancer in men

摘要

The fabrication of a pressure and flow sensor together on a single silicon substrate is presented. The detection of prostate cancer using this pressure-flow sensor system is explained. The flow sensor is based on well known thermal anemometer principles. The change in the piezoresistance due to stress being the pressure sensing principle. The realization process of the sensor is described. A pressure-flow study has been performed to characterize the sensor. Simple circuits are used to nullify the cross-talk between pressure and flow measurement.