Fabrication and characterization of optical super-smooth surfaces

摘要

Abstract: Intercomparison roughness measurements have been carried out at supersmooth artefacts fabricated from BK7, fused silica, and Zerodur. The surface parameters were determined using a special prototype of the mechanical profiler Nanostep (Rank Taylor Hobson), the Optical Heterodyne Profiler Z5500 (Zygo), and an Atomic Force Microscope (Park Scientific) with an improved acquisition technique. The intercomparison was performed after the range of collected spatial wavelength for each instrument was adjusted using digital filtering techniques. It is demonstrated for different roughness ranges that are applied superpolishing techniques yield supersmooth artefacts which can be used for more intercomparisons.!9