MMIC related metrology at the National Institute of Standards and Technology

摘要

In 1989 a long-range program was instituted at the National Institute of Standards and Technology (NIST) specifically directed at developing improved metrology methods and standards to support microwave monolithic integrated circuit (MMIC) technology. The authors describe how the program was developed, the modes of interaction with the industrial community and the DARPA MMIC initiative, and the particular projects being undertaken which will result in a more consistent measurement base for those engaged in the design and manufacture of MMIC devices. It is concluded that, by obtaining both informational inputs and support from industry, other government research laboratories, and prospective users, the opportunities for speedy technology transfer and maximum utilization of results have been enhanced.