Development of Microwave-Induced Rapid Heating System Using Wireless Carbon Heating Tubes

摘要

We report 2.45-GHz-microwave-induced heating system with carbon heating tubes (CHTs) which consists of 330-mm-long quartz tube filled with carbon particles and Ar gas. A metal cavity was developed to effectively introduce microwave to CHTs. Numerical calculation demonstrates effective absorption of microwave by CHTs placed in the cavity with 330 mm diameter. Heating CHTs with 200 S/m above 1000°C was experimentally demonstrated. 1.0x10¹⁵-cm⁻² phosphorus implanted surface regions in crystalline silicon were activated and the sheet resistivity was decreased to 78 Ω/sq with an activation ratio of 80%. The photo-induced effective minority carrier lifetime increased to 120µs because of reduction of defect induced by ion implantation.