The Denton Versa Cluster System

摘要

Denton Vacuum has recently introduced our new Versa cluster system, which uses all semiconductor-grade components, our new state-of-the-art ProcessPro™-HV software and our field-proven Discovery sputtering process modules. The Versa architecture enables manufacturers in the photonics, laser, compound semiconductor, and medical markets to gain the productivity and reliability demanded by semiconductor customers while maintaining the process capability and configuration flexibility required for these end markets. We will present some of the major system capabilities of this new, powerful platform.