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UV exposure: a novel processing method to fabricate nanowire solar cells

机译:紫外线照射:一种制造纳米线太阳能电池的新颖处理方法

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We demonstrate a novel and rapid method for nanowire (NW) solar cell processing. NW arrays were embedded in photoresist. The strong absorption of light in the NWs leads to self-limited exposure of the resist, which enables selective removal of the exposed part of the resist, opening up for the tips of the NWs and further processing. The UV-exposure technology allows a fast and low-cost process compared to the conventional reactive ion etching method.
机译:我们演示了一种新型且快速的纳米线(NW)太阳能电池处理方法。将NW阵列嵌入光刻胶中。 NW中光的强烈吸收导致抗蚀剂的自限性曝光,从而可以选择性地除去抗蚀剂的曝光部分,为NW的尖端打开并进行进一步处理。与传统的反应离子蚀刻方法相比,紫外线曝光技术可实现快速且低成本的工艺。

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