Resonant Devices and Gas Sensing: from Low Frequencies to Microwave Range

摘要

This work exploits the development and characterization of Bulk Acoustic Wave (BAW), Surface Acoustic Wave (SAW) and microwave resonant gas sensors performed at the University of Messina laboratories. The BAW and SAW sensors are characterized towards ethanol at several concentration values. The first type at few ppm, the second one at thousands of ppm covering a wide range of concentration values. The Microwave ones are tested for oxygen monitoring and they are able to work in combined mode both as resonators and as resistive sensor in DC mode. All the reported devices are able to work at room temperature with a reduced power consumption.