Picosecond ultrasonics: Characterization of single crystal piezoelectric materials for advanced RF filters

机译：皮秒超声波：高级射频滤波器的单晶压电材料的表征

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The following topics are dealt with: semiconductor device manufacture; semiconductor industry; production engineering computing; semiconductor technology; inspection; chemical mechanical polishing; process control; elemental semiconductors; integrated circuit manufacture; MOSFET.

机译：涉及以下主题：半导体器件制造;半导体行业;生产工程计算;半导体技术;检查;化学机械抛光;过程控制;元素半导体集成电路制造; MOSFET。

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《Annual SEMI Advanced Semiconductor Manufacturing Conference》|2018年|78-83|共6页
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C. Hayden; J. B. Kwon; D. Kim; S. Gibb; R. Mair; J. Dai; X. Zeng; P. Mukundhan;
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Aluminum nitride; III-V semiconductor materials; Thickness measurement; Surface acoustic waves; Optical surface waves; Radio frequency;

机译：氮化铝; III-V族半导体材料;厚度测量;表面声波;光学表面波;射频;

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专利

1. The actuation characterization of cantilevered unimorph beams with single crystal piezoelectric materials [J] . Onur Bilgen, M AminKarami, Daniel J Inman, Smart Materials & Structures . 2011,第5期

机译：单晶压电材料对悬臂单晶梁的驱动特性
2. Growth and dielectric characterization of large single crystals of GaAsO_4, a novel piezoelectric material [J] . O. Cambon, P. Yot, S. Rul Solid state sciences . 2003,第3期

机译：新型压电材料GaAsO_4的大单晶的生长和介电特性
3. Determination of the true congruent composition for LiTaO/sub 3/ single crystals using the LFB ultrasonic material characterization system [J] . Kushibiki J., Ohashi Y. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control . 2006,第2期

机译：使用LFB超声材料表征系统确定LiTaO / sub 3 /单晶的真正全同成分
4. Picosecond ultrasonics: Characterization of single crystal piezoelectric materials for advanced RF filters [C] . C. Hayden, J. B. Kwon, D. Kim, Annual SEMI Advanced Semiconductor Manufacturing Conference . 2018

机译：PICOSECOND ULTRASONICS：用于高级RF滤光片单晶压电材料的表征
5. Physics of failure modes in accelerometers utilizing single crystal piezoelectric materials. [D] . Wlodkowski, Paul Alexander. 1999

机译：利用单晶压电材料的加速度计中的失效模式物理。
6. Investigation on the Material Removal and Surface Generation of a Single Crystal SiC Wafer by Ultrasonic Chemical Mechanical Polishing Combined with Ultrasonic Lapping [O] . Yong Hu, Dong Shi, Ye Hu, 2018

机译：超声化学机械抛光与超声研磨相结合的单晶碳化硅晶片材料去除及表面生成研究
7. Performance of PIN-PMN-PT Single Crystal Piezoelectric versus PZT8 Piezoceramic Materials in Ultrasonic Transducers [O] . DeAngelis D.A., Schulze G.W. 2015

机译：PIN-PMN-PT单晶压电材料与PZT8压电陶瓷材料在超声换能器中的性能
8. Synchrotron White Beam X-Ray Topography Characterization of LGX and SXGS Bulk Single Crystals, Thin Films and Piezoelectric Devices [R] . Dudley, M. 2007

机译：LGX和sXGs大块单晶，薄膜和压电器件的同步加速器白光束X射线形貌表征

Picosecond ultrasonics: Characterization of single crystal piezoelectric materials for advanced RF filters

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