Forging basic elements of cyber-physical systems in industry 4.0 with parametric characterization for FDC

摘要

Industry 4.0 builds its entirety on the foundation stones of cyber-physical systems and the key to their realizations depend critically on the capability of constructing functioning models of the physical systems. We present an alternative approach to the efficient construction of sufficiently accurate engineering models to capture the governing process dynamics from the available data-streams of semiconductor manufacturing tools. Characterizations of these dynamic parameters provide different insights from those static features of conventional applications of elementary statistics, including their inferences. It also enables integrated formulation of concurrent process-equipment controls, in addition to the wider scope and deeper insights of effective FDC applications.