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Process Cost and Time in Minimal Fab to Fabricate Custom-made Microneedle Array with Extraction Tool

机译:使用提取工具以最小的晶圆厂制造定制的微针阵列的工艺成本和时间

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This work presents, for the first time, the study of fabrication time together with running cost of a microneedle array fabricated using minimal fab. A Si hollow-microneedle array was fabricated on a half inch wafer within 7 hours and its process cost was less than $10/chip although the process was only one chip production. A portable and disposable dropper is simply produced and assembled with microneedle array for the application of liquid extraction that may extend to be used as a blood extraction tool. The extracted liquid by one finger-push and release, up to 0.8 ml of liquid can be drawn and store in the dropper.
机译:这项工作首次提出了使用最小的晶圆厂制造微针阵列的制造时间以及运行成本的研究。在一个半英寸的晶圆上,在7个小时内就制作了一个中空的Si针阵列,尽管该工艺只是一个芯片生产,但其工艺成本不到10美元/芯片。便携式且一次性的滴管被简单地生产并与微针阵列组装在一起以用于液体提取的应用,该液体提取可以扩展用作血液提取工具。用一根手指推动并释放提取的液体,最多可以提取0.8毫升液体,并将其存储在滴管中。

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