The manufacture and characterization of a novel ultrasonic transducer for medical imaging

摘要

In this research, we demonstrate the design and manufacture of an ultrasonic transducer for medical imaging. The PZT film is used as a piezoelectric material because it has a high piezoelectric coefficient. The COMSOL Multiphysics® simulation shows that the resonant frequency of the transducer is 980 kHz, which is suitable for medical imaging. The structure of 16×16 is adopted as the array of ultrasonic transducer. Furthermore, the equivalent circuit of the device is analyzed and the experimental results show that the Piezoelectric micromachined ultrasonic transducer (pMUT) array has a suitable resonance frequency and a higher effective electromechanical coupling coefficient, suitable for medical imaging.