Hydrogen peroxide detection based on near-infrared TDLAS and Herriott cell

摘要

A compact open-path tunable diode laser absorption spectrometry (TDLAS) sensor has been developed for gas-phase hydrogen peroxide (H₂O₂) concentration monitoring during sterilization and aseptic disinfection. The sensor was based on a open-path multi-pass Herriott cell and wavelength modulated near-infrared diode laser. The sensor was calibrated by titrating the H₂O₂ water which was obtained by exhausting measured gas-phase H2O2 through a water bubbler. A detection limit of 15 ppm with single measurement is achieved in the range of approximately 0-2000 ppm. The response time is 1s, mainly limited by ramping frequency and processing speed. It offers a combination of sensitivity, fast response, dynamic range, cost effectiveness and easy operation not available in alternative H₂O₂ detectors.