Realistic worst-case parameter sets for MEMS technologies

摘要

Since MEMS systems get more and more complex their design needs accurate consideration of the worst-case conditions. This paper introduces a realistic worst-case characterization from IC design to the MEMS manufacturing process. It is based on the joint distribution of process parameters and on the sensitivity analysis of circuit performance and provides an improved worst-case charcterization to classical corner cases. It is illustrated with an industrial MEMS technology and an acceleration sensor.