A Novel Approach Towards Standardizing Surface Quality Inspection

摘要

Quality control of optical surfaces specified according to ISO 10110-7 and ISO 14997 today is mainly performed by visual inspection, despite the drawbacks common to all operator-dependent processes, such as a lack in reproducibility and accuracy. In this work we present a detailed validation study of the automated surface inspection system ARGOS, which is capable of classifying flats as well as curved optics. The study reveals that ARGOS detects imperfections as small as 1 μm, can accurately determine imperfection sizes larger than 4 μm, and has an average repeatability of around 1 μm.