A test structure for characterizing the cleanliness of glass beads using low-frequency dielectric spectroscopy

摘要

The cleanliness of glass beads was assessed using a test structure and low-frequency dielectric spectroscopy operating between 10 mHz and 100 kHz. Glass beads were exposed to moisture between 40 and 85% RH. Results indicate that capillary and film water can be used to indicate the state of cleanliness.