The Origin of so-called ghost modulated reflectance mapping and its application in FA

摘要

In this paper, the so-called ghost modulated reflectance mapping (GMRM) outside field effect transistor (FET) active regions is studied with a simplified interference model and discussed in detail. It aims at gaining an insight into the mechanism of its formation. Although such ghost image is not expected, it can also be taken into use in optimal optical frequency mapping/voltage probing in advanced logic/power IC products.