Scribing blue LED wafer using laser-induced plasma-assisted ablation with a Q-switched Nd:YAG laser

摘要

Transparent materials, such as sapphire, are found to be scribed and cut freely by sparks form metal surface on which q-switched Nd:YAG laser beam is focused through the transparent materials. This method is successfully applied to split each device for a blue LED wafer including about ten thousands of blue LEDs grown on a sapphire wafer.