A novel voice coil motor used in nano-positioning device

摘要

This paper proposes a novel moving-coil voice coil motor(VCM) used for driving nano-positioning device. This VCM implements bilateral Halbach array permanent magnet as the stator and three separated coils with the slotted coil skeleton as the mover. The VCM can achieve large stroke and nano-level positioning accuracy with the support of the compliant mechanism. Equivalent magnetic circuit method and the finite element analysis (FEA) are used in this paper to analyze the performance of the VCM. The analysis results show that the VCM can achieve a force-current ratio of 90 N/A and force ripple of ±0.19 N, which are superior than the previous designs in the literatures.