Fabrication of complex shape 3D photonic nanostructures by FIB lithography

摘要

We report fabrication of complex 3D shape nanostructures by single-pass focused ion beam milling of freely suspended metal foils and films on dielectric substrates. The approach benefits from the accuracy in nano fabrication and decreased overdeposition. The fabricated nanostructured thin films posses optical properties valuable for photonic applications: extraordinary transmission and extreme chirality.