Settling time shortening method using final state control for high-precision stage with decouplable structure of fine and coarse parts

摘要

High-precision stages require high-speed and high-precision control to improve their production throughput and quality. However, it is expected that their motion speed and accuracy will reach a limit in the near future if the structure of the conventional high-precision stage is used. Therefore, the authors designed and fabricated a stage called the catapult stage which has a decouplable structure consisting of a fine stage and a coarse stage. This stage is different from conventional dual stages in which the fine stage would be disturbed by the coarse stage since they contact with each other. This paper proposes a novel control system design for the catapult stage, and a settling time shortening control method using final-state control (FSC). So far, FSC is mainly applied to the applications such as hard disk drives whose initial states are the zero. However, it is important to consider the initial states for the catapult stage since the initial position, velocity and acceleration of the catapult stage are not equal to zero. Simulations and experimental results demonstrate the effectiveness of the proposed methods.