A technique for characterizing AC performance with a DC parametric tester

摘要

A method for measuring circuit propagation delays with a DC parametric tester is demonstrated. The technique is suitable for any normal production electrical test operation. Experimental results that demonstrate exceptional accuracy (3% error) are presented. Possible applications include improved final test yield, improved feedback to foundry on AC results, and inclusion of AC parameters in the electrical specification of the process in addition to the traditional DC parameters. The test structure consists of an on-chip CMOS ring oscillator and F/V convertor.