An endoscopic forward-viewing OCT imaging probe based on a two-axis scanning mems mirror

摘要

A two-axis scanning MEMS based forward-viewing endoscopic imaging probe has been developed and successfully applied in a swept source OCT system for three-dimensional imaging. The 2-axis MEMS mirror has an aperture size of 0.85 mm by 0.85 mm and a chip size of 1.5 mm by 1.7 mm and the outer diameter of the probe is 5.0 mm. The MEMS mirror achieves large optical scan angle up to 30° at 3 V. The MEMS based forward-imaging probe demonstrates real time 3D OCT images of human nail and rat skin with 10.6 μm axial resolution and 17.5 μm lateral resolution at a frame rate of 50 fps.