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Thin film transistors based on single-walled carbon nanotubes-polyethylenimine bilayer film for NO_2 gas detection

机译:基于单壁碳纳米管-聚乙烯亚胺双层膜的NO_2气体检测薄膜晶体管

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In this paper, bottom contact organic thin film transistors (OTFTs) using SiO_2 dielectric layer deposited on silicon wafer were fabricated for gas sensors application. Single-walled carbon nanotubes (SWNTs)- polyethylenimine(PEI) bilayer sensitive film was utilized as an active layer to test current-voltage characteristics and gas-sensing properties of the OTFT device. Due to PEI coating, the electronic characteristic of the active layer was turned from p-type (SWNTs film) into n-type (SWNTs-PEI bilayer film). When the gas sensor was exposed to NO_2 of different concentrations at room temperature, the source-drain current changed within several minutes at appropriate gate and source-drain voltages. The selectivity and repeatability of gas sensor were investigated as well. The results showed that the gas sensor exhibited outstanding properties to NO_2 gas. Moreover, the gas sensing mechanism of the sensitive film associated with the morphology analyzed by scanning electron microscope (SEM) was studied.
机译:在本文中,使用在硅片上沉积的SiO_2介电层的底部接触有机薄膜晶体管(OTFT)进行了制造,用于气体传感器应用。单壁碳纳米管(SWNTs)-聚乙烯亚胺(PEI)双层敏感膜用作有源层,以测试OTFT器件的电流-电压特性和气敏特性。由于PEI涂层,有源层的电子特性从p型(SWNTs膜)转变为n型(SWNTs-PEI双层膜)。当气体传感器在室温下暴露于不同浓度的NO_2时,在适当的栅极和源极-漏极电压下,源极-漏极电流会在几分钟内发生变化。还研究了气体传感器的选择性和可重复性。结果表明,该气体传感器对NO_2气体表现出优异的性能。此外,研究了与扫描电子显微镜(SEM)分析的形貌有关的敏感膜的气敏机理。

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